Downstream physics of the helicon discharge
نویسندگان
چکیده
منابع مشابه
Two-dimensional imaging of a helicon discharge
Two-dimensional images of the ionized argon light of a helicon discharge are made both along and across the magnetic field with various antenna configurations. Two antennas, a Nagoya type III and a helical antenna, are used to create a magnetized RF plasma with density in the range n ≤ 5× 1013 cm−3. A CCD camera with a 488 nm bandpass filter is used to image the plasma as magnetic field and pow...
متن کاملREVIEW ARTICLES Physics of helicon discharges*
Because of their high density, low-pressure discharges ionized by helicon waves are being studied for their possible use in cluster tools for the fabrication of next-generation computer chips. How helicon waves are related to whistler waves and waves in a plasma-filled waveguide is explained, and the mystery of the high ionization efficiency is outlined. Experimental data on the waves and the e...
متن کاملEvidence for Trivelpiece-Gould modes in a helicon discharge.
The high ionization efficiency of helicon discharges has been attributed to Landau damping and mode coupling to Trivelpiece-Gould (TG) modes. Though theory predicts the importance of TG modes, they have rarely been seen. Here they were detected directly by measuring their radiofrequency current with a J-dot probe, thus supporting the contention that TG modes play a role in these enigmatic plasm...
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The discharge of mine water containing sulphate may pose potential ecological risk to receiving waters. In this paper, we demonstrated the application of a risk-based approach to managing sulphate discharge using a coal mine in the Bowen Basin (Australia) as a case study. This approach integrates information on sulphate concentration and its ecological impact to quantify the risk and evaluate t...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 1996
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/5/2/009